Erik Hoggan

NCSU
Department Of Chemical Engineering 
BOX 7565
Raleigh, NC 27695


phone: (919) 513-1654
fax: (919) 513-1655
email: enhoggan@eos.ncsu.edu
Projects    Publications & Presentations    Areas of interest    Directory of all NSF students

Projects:

Past: I started work on a project involving the removal of organic contaminants on metals using liquid and supercritical CO2.
 

Present: My current work is developing a photolithographic process using dense phase CO2 as the only solvent.  My current emphasis is on spin coating films of photoresist using liquid CO2.

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Publications & Presentations:

Publications:
No peer reviewed publications on this project yet.
 
Presentations:
Spin coating using liquid and supercritical carbon dioxide; The 5th
International Symposium on Supercritical Fluids; Atlanta, Georgia, USA, April
8-12, 2000

Spin coating and photolithography using liquid and supercritical carbon dioxide;
1999 AIChE Annual Meeting; Dallas, Texas; October 31st - November 5th, 1999

Spin coating and photolithography using liquid and supercritical carbon
dioxide;  Supercritical Fluids in Materials Processing and Synthesis September
26th - October 1st, 1999; Davos, Switzerland

Spin coating and photolithography using liquid and supercritical carbon dioxide;  ACS annual meeting, New Orleans, LA, August 22-26, 1999.
 

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Areas of interest:
Semiconductors

Polymeric materials

Supercritical Fluids

 

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last update: February 07, 2001

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