Devin Flowers UNC at Chapel Hill Department Of Chemistry  CB# 3290 Venable Hall Chapel Hill, NC 27599-3290 phone: (919) 962 1346 fax: (919) 962 5467 email: flowers1@email.unc.edu

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Projects:

Past:     I have created a photoacid generator for 248nm resist system which is soluble in liquid carbon dioxide.

	Present: I am designing CO2 soluble polymer resins for 193nm resist systems.
	Future: I plan to create resist systems for carbon dioxide at wavelengths of 193nm and 157nm

Gross, S. M.; Flowers, D.; Roberts, G. W.; Kiserow, D. J.; Desimone, J. M. "Solid-State Ploymerization of Polycarbonate using CO2 " Macromolecules 1999, 32, 3167.

The 5th International Symposium on Supercritical Fluids (ISSF 2000), Atalanta, USA; April 2000 "Microlithography in Carbon Dioxide", poster presentation.